发明名称 OPTICAL SENSOR
摘要 <p>PROBLEM TO BE SOLVED: To provide a small-sized optical sensor having high sensitivity, a good S/N and high resistance against environment. SOLUTION: A supporting body for retaining a detecting film is formed from a plurality of substances having mutually different thermal expansion coefficients, and a temperature difference is provided between the temperature of the supporting body when the detecting film is mounted on the supporting body and the using environment temperature of the optical sensor to apply tension to the detecting film by a thermal deformation of the supporting body. The detecting film and the supporting body are formed from substances having different thermal expansion coefficients, and the temperature difference is provided between the temperature of the supporting body when the detecting film is mounted on the supporting body and the service environment temperature of the optical sensor to apply tension to the detecting film by a thermal deformation of the supporting body. The tension applied to the detecting film is within the range of 0.1-80 N/m.</p>
申请公布号 JP2002213995(A) 申请公布日期 2002.07.31
申请号 JP20010004592 申请日期 2001.01.12
申请人 SHOWA DENKO KK 发明人 MITANI KAZUHIRO;KOBAYASHI TERUYUKI;KAMEMURA TAKAYUKI
分类号 G01D5/28;H01L31/12;H04R23/00;(IPC1-7):G01D5/28 主分类号 G01D5/28
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