| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a laser-beam-machining method and device of simple structure where a hole with an arbitrarily shaped peripheral wall, or the like can be easily accurately machined by laser beam machining and furthermore the machining can be three-dimensionally controllable according to the advanced depth of the machining. SOLUTION: A wedge board 1 capable of rotating around an irradiation optical axis BC1 and a beam condensing lens 2 as a beam condensing optical system capable of moving in the direction of the axis BC1 are arranged on the path of a laser beam LB1-LB3. A machining portion Wa is machined with a laser beam LD3 irradiated through a beam condensing lens 2 while rotating a laser beam LB2 in an eccentric state to the irradiating optical axis that is generated by rotating the wedge board 1 around the irradiating optical axis. The eccentric quantity and/or the focus of the laser beam LB3 is adjusted by moving a beam condensing system 2 along the irradiating optical axis BC1 with the advance of the machining.</p> |
