APPARATUS FOR MANUFACTURING MULTI-LAYERED THIN FILM FOR MASS-PRODUCTION

摘要

PURPOSE: An apparatus for manufacturing multi-layered thin film is provided to reduce a manufacturing time and to prevent a contamination by simultaneously performing a number of deposition processes. CONSTITUTION: An apparatus for manufacturing multi-layered thin film comprises a substrate transferring chamber(100) having a number of opening parts(110) on one side and a pump port(120), a substrate transferring part(200) for transferring the substrates which were processed in one of the opening parts(110) to another opening part(110), and a number of chambers(300) fixed on the opening parts(110) of the substrate transferring chamber(100).