| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve safety by processing poisonous gas produced when gas whose poison is maglizible is made into a plasma and made to react on a substrate to be processed in such a case. SOLUTION: Plasma of oxidative gas produced by a plasma generating device 2, e.g. the plasma of oxygen gas or steam is guided into a processing chamber 11 and made to react on the substrate 19 to be processed, thereby performing ashing. At this time, when an electrode made of, for example, aluminum is provided to the substrate 19 to be processed with and exposed to the oxidative gas, poisonous ruthenium tetraoxide (RuO4) is produced. This poisonous gas is processed by discharge gas processing facilities 15 to improve the safety. The weighted mean time exposure limit value (TLV-TWA) of the ruthenium tetraoxide is not accurately known, but it is estimated as about 0.0002 p.p.m and considered to be very poisonous.</p> |
