APPARATUS FOR TRANSPORTING WAFER

摘要

PURPOSE: An apparatus for transporting a wafer is provided to minimize the damage of the wafer when transporting occurs between production processes by using vacuum lift to move the wafer. CONSTITUTION: An apparatus for transporting a wafer is composed of a paddle(10) placed horizontally, a driving unit(12) connected to paddle and moving it, a vacuum supplier installed on the predetermined position on the upper side of the paddle and an end effect(16) attached around the paddle by welding for tight bonding even for high-temperature process. The back side of wafer is transported with the side of it adsorbed by vacuum lift.