发明名称 MANUFACTURING METHOD FOR SURFACE ACOUSTIC WAVE ELEMENT
摘要 <p>PROBLEM TO BE SOLVED: To efficiently assign interdigital electrodes of surface acoustic wave elements to a piezoelectric substrate. SOLUTION: In the exposure to assign interdigital electrodes of the surface acoustic wave elements to the piezoelectric substrate, the rhombic interdigital electrodes are assigned to the piezoelectric substrate and exposed in a way that rhombic sides of the rhombic interdigital electrodes are adjacent to each other among adjacent chips.</p>
申请公布号 JP2002353762(A) 申请公布日期 2002.12.06
申请号 JP20010153595 申请日期 2001.05.23
申请人 HITACHI KOKUSAI ELECTRIC INC 发明人 MIYAGAWA CHIAKI
分类号 H01L41/22;H01L41/29;H01L41/338;H03H3/08;H03H9/145;H03H9/25 主分类号 H01L41/22
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