| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a small and easily handling X-ray microscope by using a close contact method for obtaining a clear X-ray image causing no blur. SOLUTION: This X-ray microscope device is provided with an X-ray generator 12, a photoelectric conversion surface 2, an electron image magnifying device 3, an electron beam detecting element 4, and an image processor 5. The electron image magnifying device 3 is provided with an anode 32 for pulling out an electron generated on the photoelectric conversion surface 2, and electromagnetic coils 33 and 34 for forming an image on a prescribed surface by magnifying an electron group. A sample 6 is arranged in close contact on the photoelectric conversion surface 2, and an electron image is formed on the photoelectric conversion surface 2 by irradiating an X-ray from the back of the sample. The electron image magnifying device 3 pulls out and magnifies the electron emitted from the electron image, and forms the electron image on an electron beam detecting element 4 surface. Since an image processor 5 presents the electron image formed on the electron beams detecting element surface as a visible image, an X-ray optical system is not used.</p> |
