发明名称 切削方法
摘要 PROBLEM TO BE SOLVED: To provide a cutting method capable of suppressing an excessive load from being placed on a cutting blade when a cut groove having a desired depth is formed in a workpiece.SOLUTION: A cutting method includes: a cutting quantity setting step of setting a cutting quantity S1 of a cutting blade 21 without exceeding a predetermined cutting quantity; a cut groove forming step of forming a cut groove Wb in a surface Wa of a workpiece W with the cutting blade 21 by placing working feed means in operation with the cutting quantity S1; a repetition step of repeating the cutting quantity setting step and cut groove forming step until the total value of the cutting quantity S1 reaches a desired depth D; an abrasion quantity measuring step of measuring the abrasion quantity m of an edge of the cutting blade 21 by placing measuring means in operation after the repetition step; and a finishing step of setting the abrasion quantity m as a cutting quantity S2 by placing cutting feed means in operation, and cutting a bottom Wc of the cut groove Wb formed in the repetition step.
申请公布号 JP6068209(B2) 申请公布日期 2017.01.25
申请号 JP20130049568 申请日期 2013.03.12
申请人 株式会社ディスコ 发明人 清水 芳昭;大前 巻子
分类号 B24B49/12;B24B27/06;H01L21/301 主分类号 B24B49/12
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