发明名称 MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To improve manufacturing efficiency by inspecting characteristics under a state where a batch sealing is formed. SOLUTION: A semiconductor chip 4 is bonded and fixed to a multi-piece substrate 8, and an electrode 4a of the semiconductor chip 4 is bonded to a bonding electrode 2b of the multi-piece substrate 8 with a bonding wire 6, and a batch mold part 9 is formed with a sealing resin 7. In this state using a probe card P, a sensing pin N is made to contact the connecting electrode 2a of the multi-piece substrate 8 to inspect electric characteristics. Each grade showing the inspected result is marked at the batch mold 9 for each device region 8a. A solder bump is formed on the rear surface of the multi-piece substrate 8 for making the batch mold 9 into individual pieces, and a marked sign showing the grade is identified by image identifying, etc., and then the pieces are stored in trays divided for each grade.</p>
申请公布号 JP2003078072(A) 申请公布日期 2003.03.14
申请号 JP20010271187 申请日期 2001.09.07
申请人 HITACHI LTD;AKITA DENSHI SYSTEMS:KK 发明人 MIURA TOMOMI
分类号 G01R31/26;H01L23/00;H01L23/12;(IPC1-7):H01L23/12 主分类号 G01R31/26
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