| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray generating device capable of reducing reflection/ dispersion from the inside of a container containing a plasma and capable of restraining temperature increase of the parts housed in the container. SOLUTION: The X-ray generating device comprises a vacuum container 107. A pulse laser beam 100 radiated from a laser beam source is focused on a target material through a glass window 102 mounted on the vacuum container 107 to generate a plasma 104, and X-ray is radiated from the plasma 104. A carbon black film 108 is formed to the inside of the vacuum container 107. By the above, heating of the parts like a mirror 105, caused by the electromagnetic wave ranging from are infrared area to an X-ray area radiated from the inner surface of the vacuum container 107, is prevented. COPYRIGHT: (C)2003,JPO |
