| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method and device having the ability to machine only the thin film of the upper layer among laminated thin films selectively into a desired shape by laser beam machining. <P>SOLUTION: In this method, a laser beam is emitted in a prescribed pattern to a second thin film 20 of a workpiece 210 having a first thin film 15 and the second thin film 20 which is laminated on the surface of the first thin film 15 and formed with a material different from that of the first. With the workpiece 210 cooled on a cooled stage 208, a laser beam is emitted to the second thin film 20, only the second thin film 20 is machined in a specific shape. <P>COPYRIGHT: (C)2003,JPO</p> |
