| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide particles which are used for cleansing substrates and can efficiently cleanse the surfaces of the substrates without damaging the substrates, to provide a cleanser containing the particles for cleansing the substrates, and to provide a method for cleansing the substrates. <P>SOLUTION: The particles for cleansing substrates are characterized by comprising an inorganic oxide and having an average particle diameter of 2 to 100μm. The inorganic oxide comprises an inorganic oxide such as silica, alumina, zirconia, titania or ceria, or a compound inorganic oxide such as silica-alumina, or silica-zirconia. The surfaces of the particles are treated with a hydrolysable organic compound represented by formula (1): R<SB>n</SB>SiX<SB>4-n</SB>(1) [R groups are each identically or differently a 1 to 10C non-substituted or substituted hydrocarbon group; X is a 1 to 4C alkoxy, silanol, a halogen, or H; (n) is 1 to 3]. <P>COPYRIGHT: (C)2004,JPO</p> |
