| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow sensor that has a small variation in flow velocity or in flow rate characteristic due to fluid's pressure variation and is upgraded in precision, reproducibility, reliability and endurance, and is manufacturable with reduced parts number. <P>SOLUTION: The sensor is provided with a flow path forming member 22 and a sensor chip 21 for forming the flow path 3 of a fluid 2 together with the flow path forming member 22. The sensor chip 21 comprises a substrate 24 and a flow velocity detecting means 25, etc. The substrate 24 comprises a thick fixed part 24A and a thin part 24B. The fixed part 24A is joined to the flow path forming member 22, and the flow velocity detecting means 25 and a surrounding temperature detecting means 34 are formed thereon through an electrical insulating film 13 on the opposite surface of the surface contacting with the fluid 2 of the thin part 24B. <P>COPYRIGHT: (C)2004,JPO</p> |
