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发明名称
薄膜除去方法及装置
摘要
一种薄膜去除方法，系对表面经过薄膜(11)处理之基板(12)照射雷射光束(13)来去除基板(12)表面之薄膜(11)。该雷射光束(13)相对于该基板(12)表面系自倾斜方向进行照射。
申请公布号
TW200401684
申请公布日期
2004.02.01
申请号
TW092118978
申请日期
2003.07.11
申请人
日立造船股份有限公司;武井电机工业股份有限公司;苏妮股份有限公司
发明人
福田直晃;北侧彰一;加藤刚;山田实;武井健治;谷本康范;鹈饲育弘;宗像昌树
分类号
B23K26/00
主分类号
B23K26/00
代理机构
代理人
林镒珠
主权项
地址
日本
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