ACTIVE ENERGY RAY-SENSITIVE RESIN COMPOSITION, ACTIVE ENERGY RAY-SENSITIVE RESIN FILM AND PATTERN FORMING METHOD USING SAME

摘要

PROBLEM TO BE SOLVED: To provide an active energy ray-sensitive resin composition developable with neutral water.

SOLUTION: A water-insoluble or slightly water-soluble acid generator which generates an acid by the action of an active energy ray is dispersed in the form of fine powder in an aqueous solution of a water-soluble resin to prepare a dispersion and an acid reactive insolubilizing agent which insolubilizes the water-soluble resin by the action of an acid is dissolved or dispersed in the dispersion.

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