| 摘要 |
PURPOSE: An injector install/uninstall apparatus and method for APCVD(Atmospheric Pressure Chemical Vapor Deposition) are provided to prevent damage of an injector due to drop by using an enhanced injector replacing mechanism with a cylinder rod. CONSTITUTION: An injector install/uninstall apparatus includes a cylinder block, a cylinder block driver, an upper and lower sensing switch, a loading and unloading sensing switch and an injector install/uninstall control block. The cylinder block(420) includes a cylinder rod(414) for replacing an injector(18) with a new one. The cylinder block driver(421) is connected with the cylinder block to transfer selectively the cylinder block to a loading region or an unloading region. The upper and lower sensing switches(425,426) are used for sensing selectively the motion of the cylinder rod. The loading and unloading sensing switches(427,428) are used for sensing selectively the motion of the cylinder block. The injector install/uninstall control block(430) is used for controlling selectively the loading and unloading of the injector.
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