发明名称 |
Polishing compositions comprising polymeric cores having inorganic surface particles and method of use |
摘要 |
This invention relates generally to compositions and methods for removing adherent materials and polishing surfaces. In one embodiment, the method employs an improved media comprising core-shell particles. The media can be applied to microelectronic objects of manufacture.
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申请公布号 |
US6918820(B2) |
申请公布日期 |
2005.07.19 |
申请号 |
US20030411735 |
申请日期 |
2003.04.11 |
申请人 |
EASTMAN KODAK COMPANY |
发明人 |
SMITH DENNIS E.;BABU SURYADEVARA V. |
分类号 |
C09G1/02;C09K3/14;(IPC1-7):B24B1/00 |
主分类号 |
C09G1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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