SURFACE PROCESSING DEVICE AND METHOD

摘要

PROBLEM TO BE SOLVED: To efficiently perform surface processing on a workpiece of large area even though hole rows are short in a surface processing device that sprays a processing gas onto the surface of the workpiece from the hole rows of slits or the like.

SOLUTION: A plurality of electrode plates 11, 12 are juxtaposed at the processing section 1 of a plasma surface processing device M. Slit-like hole rows 10a are formed between the adjacent electrode plates, and a hole-row group 100 is configured by a plurality of the juxtaposed hole rows 10a. The workpiece W is moved along the extending directions of each slit 10a by a movement mechanism 4.

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