| 摘要 |
<P>PROBLEM TO BE SOLVED: To manufacture an inexpensive, high performance piezoelectric element by crystallizing a piezoelectric substance through laser annealing. <P>SOLUTION: A vibrating plate 5 made of heat-resistant glass is anodic bonded to a Si substrate 1 in which a groove is formed to be formed as a liquid flow channel comprising a pressure chamber 2, a liquid inlet 3, a nozzle 4, or the like. After forming a lower electrode 11 on the vibrating plate 5, an amorphous piezoelectric substance film is formed. A part of the amorphous piezoelectric substance film corresponding to the pressure chamber 2 is irradiated with laser light to be crystallized, thereby forming a piezoelectric film 12. Between the piezoelectric film 12 and an amorphous part 12b, which is not irradiated with the laser light, an intermediate layer 12c is provided in which an amorphous substance and a crystal coexist. On these areas, a pad 14 for wire bonding which connects an upper electrode 13 to the outside is formed. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
