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发明名称
POSITIONIERVORRICHTUNG FUER LEITERRAHMEN
摘要
申请公布号
DE2332269(A1)
申请公布日期
1974.01.31
申请号
DE19732332269
申请日期
1973.06.25
申请人
HITACHI, LTD., TOKIO
发明人
ARAI, FUMIO, KODAIRA, TOKIO (JAPAN)
分类号
H01L21/68;H01L21/00;H01L21/50;(IPC1-7):H01L1/14
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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