Energy storage devices formed with porous silicon

摘要

In one embodiment, an energy storage device (e.g., capacitor) may include a porous silicon layer formed within a substrate. The porous silicon layer includes pores with a mean pore diameter less than approximately 100 nanometers. A first conductive layer is formed on the porous silicon layer and a first dielectric layer is formed on the first conductive layer. A second conductive layer is formed on the first dielectric layer to form the capacitor.

主权项

1. An energy storage device, comprising:
a mesoporous silicon layer formed within a substrate by electrochemically etching the substrate with no photolithography, the mesoporous silicon layer having pores with tapered pore openings and with a mean pore diameter of approximately 50 nanometers or less; a first conductive layer formed on the mesoporous silicon layer; a first dielectric layer formed on the first conductive layer; and a second conductive layer formed on the first dielectric layer.