Conductive line patterning

摘要

A conductive line structure includes two conductive lines in a layout. The two cut lines are over at least a part of the two conductive lines in the layout. The cut lines designate cut sections of the two conductive lines and the cut lines are spaced from each other within a fabrication process limit. The two cut lines are connected in the layout. The two conductive lines are patterned over a substrate in a physical integrated circuit using the two connected parallel cut lines. The two conductive lines are electrically conductive.

主权项

1. A conductive line structure, comprising:
a substrate; and a first conductive line formed over the substrate, the first conductive line having a first cut section, the first cut section having a first sidewall that forms a first cut angle and a second sidewall that forms a second cut angle, the first cut angle being different from the second cut angle, the first cut section being a gap between two portions of the first conductive line, and wherein a straight line extending along an elongated axis of each of the two portions of the first conductive line passes through the gap; and a second conductive line formed over the substrate, the second conductive line having a second cut section, the second cut section being a gap between two portions of the second conductive line, wherein a straight line extending along an elongated axis of each of the two portions of the second conductive line passes through the gap.