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发明名称
CYLINDRICAL RF SPUTTERING APPARATUS
摘要
申请公布号
US3901784(A)
申请公布日期
1975.08.26
申请号
US19740481077
申请日期
1974.06.19
申请人
UNITED AIRCRAFT CORPORATION
发明人
QUINN, DANIEL J.;PARADIS, EDOUARD L.
分类号
C23C14/35;H01J37/34;(IPC1-7):C23C15/00
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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