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发明名称
EKISOEBITAKISHARUKETSUSHOSEICHOHO
摘要
申请公布号
JPS5192788(A)
申请公布日期
1976.08.14
申请号
JP19750017462
申请日期
1975.02.13
申请人
发明人
分类号
C30B19/06;C30B29/40;H01L21/208
主分类号
C30B19/06
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代理人
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