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经营范围
发明名称
SEMIICONDUCTOR WAFER PROCESSING
摘要
申请公布号
JPS5234666(A)
申请公布日期
1977.03.16
申请号
JP19750094043
申请日期
1975.07.31
申请人
MATSUSHITA ELECTRONICS CORP
发明人
MATSUBARA HIDEAKI;KATOU KOUKI;TSUCHIYA YOSHIKAZU
分类号
H01L21/223;H01L21/22;H01L21/314
主分类号
H01L21/223
代理机构
代理人
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