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发明名称
INSPECTION METHOD FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5439576(A)
申请公布日期
1979.03.27
申请号
JP19770106105
申请日期
1977.09.02
申请人
NIPPON ELECTRIC CO
发明人
HONMA MICHIO
分类号
G01R31/26;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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