Substrate including a diamond layer and a composite layer of diamond and silicon carbide, and, optionally, silicon

摘要

A multilayer substrate includes a diamond layer CVD grown on a composite layer. The composite layer includes particles of diamond and silicon carbide and, optionally, silicon. A loading level (by volume) of diamond in the composite layer can be ≧5%; ≧20%; ≧40%; or ≧60%. The multilayer substrate can be used as an optical device; a detector for detecting radiation particles or electromagnetic waves; a device for cutting, drilling, machining, milling, lapping, polishing, coating, bonding, or brazing; a braking device; a seal; a heat conductor; an electromagnetic wave conductor; a chemically inert device for use in a corrosive environment, a strong oxidizing environment, or a strong reducing environment, at an elevated temperature, or under a cryogenic condition; or a device for polishing or planarization of other devices, wafers or films.

主权项

1. A multilayer substrate comprising:
a composite layer comprised of diamond particles and silicon carbide particles; and a chemical vapor deposition (CVD) grown diamond layer on the composite layer, wherein diamond of the diamond layer is CVD grown on crystal surfaces of the diamond particles and/or the silicon carbide particles comprising the composite layer, wherein the diamond layer comprises polycrystalline diamond, wherein the composite layer is comprised of silicon articles.