发明名称 A HETEROJUNCTION SEMICONDUCTOR LASER
摘要 A heterostructure semiconductor laser is characterized by having a channeled mesa contiguous with the top surface of the laser substrate. The channeled mesa comprises an elongated mesa with an elongated channel formed in the top surface of the mesa structure. The epitaxial growth of semiconductor layers over the channeled mesa produces layers having uniform thickness with smooth facet like texture and without layer surface irregularities. The channeled mesa may also be employed in the fabrication of nonplanar large optical cavity lasers.
申请公布号 DE3067156(D1) 申请公布日期 1984.04.26
申请号 DE19803067156 申请日期 1980.09.04
申请人 XEROX CORPORATION 发明人 BURNHAM, ROBERT D.;SCIFRES, DONALD R.;STREIFER, WILLIAM
分类号 H01L21/208;H01S5/00;H01S5/223;H01S5/227;(IPC1-7):H01S3/19 主分类号 H01L21/208
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