发明名称 Composition control of CSVPE HgCdTe
摘要 Method for growing HgCdTe (15) upon a CdTe substrate (5) using a HgTe source (3) and close-spaced vapor phase epitaxy (CSVPE). A processing temperature T of between 520 DEG C. and 625 DEG C. is employed over a processing time t of between approximately 1/4 and 4 hours. The thickness A of the grown HgCdTe (15) is a linear function of processing time t. The mole fraction x of cadmium in the HgCdTe (15) is a linear function of temperature T and an exponential function of the mole fraction y of mercury in the source (3). The lower the relative amount of mercury in the source (3), the greater the relative amount of mercury in the end product (15), and vice versa. Any crystal plane and any axial orientation of the CdTe substrate (5) can be used without affecting the rate of growth of the HgCdTe (15), the single crystal nature of the HgCdTe (15), or the mirror-like finish of its surface. At least 90% of the transition between the CdTe substrate (5) and the grown HgCdTe layer (15) occurs within the first 20% of the HgCdTe layer (15); for distances greater than this away from the substrate (5), the HgCdTe (15) exhibits a substantially uniform x.
申请公布号 US4487813(A) 申请公布日期 1984.12.11
申请号 US19830536018 申请日期 1983.09.26
申请人 FORD AEROSPACE & COMMUNICATIONS CORPORATION 发明人 KAY, ROBERT E.
分类号 H01L21/363;H01L31/0296;H01L31/18;(IPC1-7):H01L31/00 主分类号 H01L21/363
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