Glow-discharge decomposition apparatus.

摘要

A glow-discharge decomposition apparatus comprising ground electrodes, substrates, RF-electrodes, a RF-power supply, a matching circuit and a controlling circuit having at least one electric element; each of the substrates being provided on the ground electrodes which are placed over each of the RF-electrories in parallel to each other; each of the RF-electrodes standing in parallel and being electrically insulated to each other; the matching circuit being connected to accept a RF-power from the RF-power supply; the controlling circuit being connected to accept a RF-power from the matching circuit; and the outputs of the controlling circuit being connected to supply RF-powers to- the RF-electrodes. The films are fabricated on the substrates by supplying RF-powers being independently controlled via the controlling circuit, thereby plasmas are controlled over each of the RF-electrodes. Thus, deposition rates are individually controlled and uniform films are fabricated on each of the substrates.