Method for the production of substrates with a uniform dispersion of extremely fine granules

摘要

A method for the production of substrates with a uniform dispersion of extremely fine granules comprising: forming extremely fine granules in a granule-formation chamber under a reduced pressure by a gas-evaporation technique, introducing said extremely fine granules into a granule-recovering chamber under high vacuum, which is adjacent to said granule-formation chamber, through a slit formed in the partition between said granule-formation chamber and said granule-recovering chamber, and allowing said extremely fine granules to be dispersed on and attached to a supporter disposed in said granule-recovering chamber.