Audio sensing device and method of acquiring frequency information

摘要

An audio sensing device having a resonator array and a method of acquiring frequency information using the audio sensing device are provided. The audio sensing device includes a substrate having a cavity formed therein, a membrane provided on the substrate and covering the cavity, and a plurality of resonators provided on the membrane and respectively sensing sound frequencies of different frequency bands.

主权项

1. An audio sensing device comprising:
a substrate having a cavity formed therein; a membrane provided on the substrate and covering the cavity; and a plurality of resonators provided on the membrane and respectively configured to sense sound frequencies of different frequency bands, wherein each of the plurality of resonators comprises:
a first electrode provided on the membrane; anda second electrode fixedly provided on the membrane and spaced apart from the first electrode, and wherein the first electrode is disposed between the membrane and the second electrode.