Method of manufacturing an ultrasonic transducer

摘要

Electrode layers are formed on planes of a plate-shaped piezoelectric element to provide an ultrasonic transducer material. The ultrasonic transducer material is bonded to an electrically insulating substrate by electrically conductive adhesive. A plurality of conductors is provided on the substrate in the array direction and a direction perpendicular to the array direction. A printed circuit is formed on the backside of the substrate to connect the conductors. Notches are cut out in the ultrasonic transducer material to divide it into a plurality of transducer elements arranged in the array direction and a direction perpendicular to the array direction. A ground electrode connects the second electrodes of the ultrasonic transducer elements. The transducer elements are impressed with voltage through the printed circuit and ground electrode to issue ultrasonic waves.