发明名称 APPARATUS FOR MEASURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要 PURPOSE:To easily separate a semiconductor integrated circuit device from a jig and to reduce the time directly required in evaluation and selection by half, by adding a mechanism for raising the semiconductor integrated circuit device to an apparatus for evaluating and selecting said device. CONSTITUTION:When an IC 14 as an element is measured, an operating lever 1 is lowered to lower a pressing pad 11 and the device 14 is inserted in the hole 12 of a measuring board 13 to bring the IC 14 into contact with the electrode 15 of the board 13. At this time, a simultaneously raised pad 2 is lowered and present at a position separated from the device 14. Next, the lever 1 is raised after the finish of measurement to separate the pressing pad 11 from the device 14 and the raising pad 2 is pushed in the hole 12 of the board 13 from below and levitates the device 14 from the board 13 by about 1-2mm to allow the device 14 easy to grasp. By this method, the time directly required in evaluation and selection can be reduced by half.
申请公布号 JPS63317785(A) 申请公布日期 1988.12.26
申请号 JP19870155200 申请日期 1987.06.22
申请人 NEC CORP 发明人 OKUBO TAKAHITO
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
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