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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6476753(A)
申请公布日期
1989.03.22
申请号
JP19870234312
申请日期
1987.09.17
申请人
NEC CORP
发明人
SASAKI SHOICHI
分类号
H01L29/73;H01L21/331;H01L21/8249;H01L27/06;H01L29/72;H01L29/732
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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