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发明名称
ION IMPLANTING APPARATUS
摘要
申请公布号
JPH01189845(A)
申请公布日期
1989.07.31
申请号
JP19880013533
申请日期
1988.01.26
申请人
TOSHIBA CORP
发明人
MIKAMI HITOSHI
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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