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发明名称
GAAS-EINKRISTALL, VERFAHREN ZU SEINER HERSTELLUNG UND DEN EINKRISTALL VERWENDENDES HALBLEITERBAUELEMENT.
摘要
申请公布号
DE3575242(D1)
申请公布日期
1990.02.08
申请号
DE19853575242
申请日期
1985.10.01
申请人
HITACHI, LTD., TOKIO/TOKYO, JP
发明人
FUJISAKI, YOSHIHISA, SETAGAYA-KU TOKYO, JP;TAKANO, YUKIO, MUSASHIMURAYAMA-SHI TOKYO, JP;ISHIBA, TSUTOMU, KODAIRA-SHI TOKYO, JP
分类号
H01L29/812;C30B15/00;H01L21/20;H01L21/338;H01L29/12;H01L29/20;H01L29/207;H01L29/32;H01L29/80;H01L47/00
主分类号
H01L29/812
代理机构
代理人
主权项
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