发明名称 |
Automatic frequency follow-up in particle beam metrology upon employment of a modulated primary beam |
摘要 |
A method and apparatus provide compensation of frequency drift phenomenon of a signal to be investigated in an electron beam measuring unit. A regulating signal is acquired from the signal to be investigated and the modulation frequency (fb) of a beam blanking generator in the electron beam measuring arrangement is modified therewith in accordance with the frequency drift in the investigated signal.
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申请公布号 |
US4972142(A) |
申请公布日期 |
1990.11.20 |
申请号 |
US19880251371 |
申请日期 |
1988.09.30 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
BRUST, HANS D. |
分类号 |
G01N23/22;G01Q30/02;G01R19/00;G01R31/302;G01R31/305;H01J37/26;H01J37/28;H01L31/00 |
主分类号 |
G01N23/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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