INSPECTING EQUIPMENT FOR WIRING PATTERN,申请号JP19890333470-传众专利搜索

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发明名称	INSPECTING EQUIPMENT FOR WIRING PATTERN
摘要
申请公布号	JPH03194947(A)	申请公布日期	1991.08.26
申请号	JP19890333470	申请日期	1989.12.22
申请人	SHARP CORP	发明人	HARADA TOKUMI;TANIGAWA TORU;ICHIKAWA MASAMI
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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