SEMICONDUCTOR DEVICE WITH LOW DEFECT DENSITY OXIDE,申请号KR19880017446-传众专利搜索

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发明名称	SEMICONDUCTOR DEVICE WITH LOW DEFECT DENSITY OXIDE
摘要
申请公布号	KR930003271(B1)	申请公布日期	1993.04.24
申请号	KR19880017446	申请日期	1988.12.26
申请人	AMERICAN TELEPHONE AND TELEGRAPH CO.	发明人	DOKLAN, RAYMOND H.;MARTIN JR., EDWARD P.;ROY, PRADIP K.;SHIVE, SCOTT F.;SINHA, ASHOK K.
分类号	H01L21/28;H01L21/314;H01L21/316;H01L21/318;H01L29/51;H01L29/78;(IPC1-7):H01L21/31	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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