摘要 |
The system includes a photoelectric incremental sensor arrangement with a crossed raster scale and a measurement arrangement moving relative to it. The measurement arrangement consists of opaque scanning raster plates with the exception of two groups, each of two pairs of windows (4-7;8-11). The centre lines (A,B) of the groups intersect perpendicularly with the pairs of each group opposite each other on either side of the intersection. The windows have line raster with the same raster constant, line and gap width as the associated coordinates of the crossed raster. The line rasters are offset from window to window in each group by fractions of the raster constants. USE/ADVANTAGE - For pcb processing using mechanical machine or laser, semiconductor bonding, machining using x-y table etc. Can operate with back light and top illumination and can detect end and null positions as well as measure displacements.
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申请人 |
LPKF CAD/CAM SYSTEME IN THUERINGEN GMBH, O-6024 SUHL, DE |
发明人 |
LOEWE, BERNHARD, DR., O-6019 SUHL, DE;PAHL, ULRICH, DR., O-6019 SUHL, DE |