PHOTOSENSITIVE POLYIMIDE PRECURSOR COMPOSITION

摘要

PURPOSE: To obtain a compsn. increasing resolution and sensitivity while reducing the lass of thickness at the time of development by using a polyimide precursor and a complex cation of a polymerizable functional carboxylic acid compd. having a tert. amino functional group as a reactivity modifier. CONSTITUTION: An unmodified polyimide precursor such as a precursor of polyester imide, polyamide-imide-ester, polyamide-imide or polysiloxane-imide as well as other mixed polyimides is included in a polyimide precursor (polyamic acid) used. A required reactivity modifier is a complex cation of a polymerizable functional carboxylic acid compd. having a tert. amino functional group. This tert. amino functional substance preferably contains a polymerizable part such as an ethylenic unsatd. part and/or plural tert. amino positions.