| 摘要 |
PURPOSE: To enable cleaning as planar plasma reaction vessel by exciting the atmosphere containing ozone in a reaction chamber, making reaction with carbon-based residue, and discharging the formed volatile final product from the reaction vessel. CONSTITUTION: Process gas which accompanies a cleaning cycle is made to flow into a reaction vessel 10 through an anode 16. A high-frequency voltage 25 is applied to the vessel, and ozone-containing reactive species are excited. Ozone plasma reacts with a fluorocarbon polymer 30 on the vessel surfaces 11, 12, 13, 16, 17, and forms a volatile residue. The reactive gas and the volatile residue are discharged from the reaction vessel, through a mechanical pump 29. The time for cleaning is 15-30 minutes. Thereby dry cleaning work is improved.
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