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发明名称
TEMPERATURE CONTROL SYSTEM OF DRY INTERFACE THERMAL CHUCK FOR SEMICONDUCTOR WAFER TEST
摘要
申请公布号
JPH0653298(A)
申请公布日期
1994.02.25
申请号
JP19900405226
申请日期
1990.12.21
申请人
INTERNATL BUSINESS MACH CORP <IBM>
发明人
ANSONII JIYON ABURAMI;SUCHIYUAATO HAWAADO BARAADO;SANTEIAGO ERUNESUTO DERU PUERUTO;POORU MACHIYUU GASHIYUKU;MAAKU REIMONDO RAFUOOSU;POORU JIYOSEFU ROGUMAN;KOOTO FUOSUTAA RONGENBATSUKU
分类号
G01R31/28;G05D23/19;G05D23/20;G05D23/24;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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