DRY ETCHING OF SILICON NITRIDE FILM,申请号JP19920273293-传众专利搜索

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发明名称	DRY ETCHING OF SILICON NITRIDE FILM
摘要
申请公布号	JPH06124924(A)	申请公布日期	1994.05.06
申请号	JP19920273293	申请日期	1992.10.13
申请人	FUJITSU LTD	发明人	HIZUYA KENICHI;SAITO TSUTOMU
分类号	H01L21/302;H01L21/3065;(IPC1-7):H01L21/302	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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