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发明名称
Method for producing a tungsten element for an interconnection in a semiconductor
摘要
申请公布号
IT1246700(B)
申请公布日期
1994.11.26
申请号
IT19900020872
申请日期
1990.07.05
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM EUI-SONG
分类号
H01L;(IPC1-7):H01L
主分类号
H01L
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代理人
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