| 发明名称 |
Vacuum drying apparatus |
| 摘要 |
PCT No. PCT/JP92/00657 Sec. 371 Date Jan. 7, 1993 Sec. 102(e) Date Jan. 7, 1993 PCT Filed May 22, 1992 PCT Pub. No. WO92/20984 PCT Pub. Date Nov. 26, 1992.A vacuum drying apparatus characterized by a means for pre-heating a product by hot air, provided to a vacuum container having a heater housed therein.
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| 申请公布号 |
US5377425(A) |
申请公布日期 |
1995.01.03 |
| 申请号 |
US19930934655 |
申请日期 |
1993.01.07 |
| 申请人 |
NIKKU INDUSTRY CO., LTD.;SENJU METAL INDUSTRY CO., LTD. |
发明人 |
KAWAKAMI, OSAMU;TSURUTA, KAICHI |
| 分类号 |
F26B3/30;F26B5/04;F26B23/04;H01L21/027;H05K3/22;(IPC1-7):F26B13/30 |
主分类号 |
F26B3/30 |
| 代理机构 |
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