发明名称 METHOD FOR FORMING VIA HOLE OF HIGH-DENSITY CIRCUIT SUBSTRATE
摘要 PURPOSE:To improve quality and achieve a high-density packaging while conserving earth environment without breaking ozone layer by printing a thick-film dielectric paste on a circuit substrate and then applying ultraviolet rays via a glass mask negative and performing development with a specific development agent. CONSTITUTION:A thick-film dielectric paste 4 containing a sensitized resin is printed on a circuit substrate 1 by a screen 3 for thick-film printing where the pattern of a large-diameter via hole 7 is formed by emulsion 2. Then, ultraviolet rays are applied via a glass mask negative 5 where the patterns of the large-diameter via hole 7 and a small-diameter via hole 6 are formed. Then, the mixed liquid of acetic ether or ester solvent medium as a development solvent medium and normal hexane or xylene or benzene as a development suppression solvent medium is used as a development agent for development. Further, the circuit substrate 1 is mounted on a spinner as the development system and is developed by the shower or puddle system, thus achieving a high-density packaging without breaking ozone layer on earth.
申请公布号 JPH07240581(A) 申请公布日期 1995.09.12
申请号 JP19940028742 申请日期 1994.02.28
申请人 NEC IBARAKI LTD 发明人 TOMITA KIYOSHI
分类号 H05K3/00;H05K3/46;(IPC1-7):H05K3/46 主分类号 H05K3/00
代理机构 代理人
主权项
地址