| 摘要 |
PURPOSE:To shorten the assembling time of a pulsed laser oscillator and improve the attaching positional accuracy of the oscillator by improving the workability of the adjusting work of a pin for pre-ionization and, at the same time, to reduce the inductance of the circuit of a discharging electrode section so as to obtain stable discharge by making the electrode section compact. CONSTITUTION:A pulsed laser oscillator is provided with a pair of current plates 13 and 14 which guide the flow of a gas for oscillating laser light to a prescribed direction and are counterposed to each other through a supporting member having an opening in the flowing direction of the gas, a pair of main electrode 1 and 2 which are respectively attached to the plates 13 and 14 and counterposed to each other in the direction perpendicular to the flowing direction of the gas, at least a pair of needle-like electrodes 4 and 4 for pre-ionization, and capacitors 3 which are respectively positioned between the main electrodes 1 and 2 and needle-like electrodes 4 and 4 and connect the electrodes 1 and 2 to the electrodes 4 and 4. |
