Structure for depositing a metallization pattern thereon and processes of forming such a structure,申请号EP19890117153-传众专利搜索

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发明名称	Structure for depositing a metallization pattern thereon and processes of forming such a structure
摘要
申请公布号	EP0364740(B1)	申请公布日期	1996.04.03
申请号	EP19890117153	申请日期	1989.09.16
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	BRUCE, JAMES ALLEN;KERBAUGH, MICHAEL LYNN;KWONG, RANEE WAI-LING;LEE, TANYA NINA;LINDE, HAROLD GEORGE;SACHDEV, HARBANS SINGH;SACHDEV, KRISHNA GANDHI
分类号	H01L21/302;G03F7/09;G03F7/40;H01L21/027;H01L21/3065;(IPC1-7):G03F7/09	主分类号	H01L21/302
代理机构		代理人
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